➢ 纳米级分辨率非接触测量 ➢ 尺寸小,大角度,小光斑 ➢ 最小光斑3.5um 业务咨询: 销售经理:刘荣富 手 […]
➢ 纳米级分辨率非接触测量
➢ 尺寸小,大角度,小光斑
➢ 最小光斑3.5um
业务咨询:
销售经理:刘荣富 手机:13929965156
销售经理:卢建荣 手机:13929965158
销售经理:刘喜发 手机:13928506745
机器型号 | X、Y轴工作行程 | 工作距离 | 测量范围 | 光点直径 | Z轴分辨率 | 横向分辨率 | 最大线性误差 | 最小可测厚度 | 最大角度 |
GLT–15R37D0.36 | 500 | 6.7mm | 0.36mm | 8um | 2nm | 4um | ±0.09um | 12um | ±37° |
GLT–15R37D0.18 | 500 | 6.8mm | 0.18mm | 8um | 1nm | 4um | ±0.05um | 6um | ±37° |
GLT–15R37D0.65 | 500 | 6mm | 0.65mm | 3.5um | 2nm | 1.8 | ±0.16um | 22um | ±32° |
GLT–15R32D0.32 | 500 | 6.2mm | 0.32mm | 3.5um | 1nm | 1.8 | ±0.08um | 11um | ±32° |
GLT–15R32D0.16 | 500 | 6.2mm | 0.16mm | 3.5um | 1nm | 1.8 | ±0.04um | 6um | ±32° |
GLT–15R20D1.40 | 500 | 13.8mm | 1.4mm | 13um | 4nm | 7um | ±0.35um | 47um | ±20° |
GLT–15R20D0.70 | 500 | 14.2mm | 0.7mm | 13um | 2nm | 7um | ±0.18um | 23um | ±20° |
GLT–15R20D0.30 | 500 | 14.2mm | 0.3mm | 13um | 1nm | 7um | ±0.08um | 10um | ±20° |
GLT–15R20D1.4L | 500 | 13.6mm | 1.4mm | 13um | 4nm | 7um | ±0.35um | 47um | ±20° |
GLT–15R20D0.7L | 500 | 14mm | 0.7mm | 13um | 2nm | 7um | ±0.18um | 23um | ±20° |
GLT–15R20D0.3L | 500 | 14mm | 0.3mm | 13um | 1nm | 7um | ±0.08um | 10um | ±20° |